Part name

     Specification

Supplier

Quantity

Chamber size

 Ø1300mm×H1500mm

 CICEL

 1set

Lining board

1mm stainless steel

 CICEL

 1set

Work piece steady

custom—made

 CICEL

 1set

Rotation system 

  Frequency regulation

 CICEL

 1set

Bias power supply

        30kw

  GUANGDONG

 1set

arc power supply

        200A

  GUANGDONG

 12sets

Ti target 

 Ø100

 CICEL

 12pcs

Flow value

     D07—7C series

BEIJING

 4sets

Flow control instrument

     D07—7C series

BEIJING

 1set

 Gas—pressure gauge

  international standard

CICEL

 1set 

Vacuum measurement

      ZDF—5227

 SICHUAN

 1set

Heating pipe

      9KW

   CICEL

 12sets

valve

Main valve

       GDQ—800

 CICEL

 1set

Rough valve

       GDQ—200

 CICEL

 1 set

Front valve

       GDQ—150

 CICEL

 1 set

vacuum system

Diffusion pump

       KT—800

 CICEL

 1set

Mechanical pump

       2X—70

SHANGHAI

 2sets

Roots pump

       ZJY—600A

     SHANGHAI

 1set

Holding pump

       2X—15

    SICHUAN

 1set

Electrical appliances

   Standard equipment

 Omron&Delixi

 1set